Optically opaque materials present a series of challenges for alignment and overlay in the semi-damascene process flow or after the processing of the magnetic tunnel junction (MTJ) of a Magnetic ...

Forward-looking: Researchers at the University of Massachusetts Amherst have developed a laser-based technique to align 3D semiconductor chips, potentially overcoming a longstanding challenge in chip ...

Researchers have invented a new way to align 3D semiconductor chips by shining a laser through concentric metalenses patterned on the chips to produce a hologram. Their work can help to lower the cost ...

(Nanowerk News) Dielectric metasurfaces represent one of the cutting-edge research and application directions in the current optical field. They not only possess the advantage of low loss but also ...

Overlay metrology tools improve accuracy while delivering acceptable throughput, addressing competing requirements in increasingly complex devices. In a race that never ends, on-product overlay ...