Business Wire

Quartz Unlimited LLC. Announcing the Availability of Quartz Wafers for CMP Tools for Applied Materials Mirra, Mirra Mesa and Reflexion Family of Machines

BOCA RATON, Fla.--(BUSINESS WIRE)--June 28, 2005--Quartz Unlimited LLC. is offering a cost saving alternative of using reclaimed TEOS or thermal oxide dummy wafers for CMP(a) tools retaining ring ...
Semiconductor Engineering

Precise Control Needed For Copper Plating And CMP

Chipmakers are relying on machine learning for electroplating and wafer cleaning at leading-edge process nodes, augmenting traditional fault detection/classification and statistical process control in ...
EDN

Lam says new platen controls CMP processes within 2 mm of wafer’s edge

FREMONT, Calif.–Lam Research Corp. here today introduced a new platen for its 200-mm wafer chemical mechanical planarization (CMP) system designed to extend reliable control of polishing processes ...
Business Wire

Applied Materials Celebrates 2,500th CMP System Shipment, Reflecting Ten Years of CMP Technology Leadership

SANTA CLARA, Calif.--(BUSINESS WIRE)--Applied Materials, Inc. today announced the shipment of its 2,500 th CMP 1 system, marking a major milestone in the industry and ten consecutive years of CMP ...