FREMONT, Calif.–Chip-equipment maker Mattson Technology Inc. Monday (April 19) rolled out its latest dry-strip tool for 200- and 300-mm wafer fabs. The tool, dubbed the Aspen III ICPHT dry strip ...
BEVERLY, Mass. – Paving the way for next-generation devices down to the 45-nm node, Axcelis Technologies Inc. here today (May 27) rolled out a 300-mm dry strip tool for use in “damage-free” cleaning ...
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