The term scatterometry is a general term for a variety of methods that are used to analyze the diffraction spectrum from illuminated samples. The unknown structure parameters are reconstructed by the ...

(Nanowerk Spotlight) After achieving the 45-nm process, today's semiconductor industry is nearing the 20-nm process and looking for techniques that would enable sub-22-nm-half-pitch line patterns [2].

A variety of ultrathin nanomechanical diffraction gratings that have been fashioned from the “wonder material” graphene have been created by an international team of researchers. The team wanted to ...