MEMS are primarily transducer systems that can control or sense chemical, optical, or physical quantities, such as fluids, acceleration, or radiation. A MEMS device/transducer possesses an electrical ...

Integration of microelectromechanical systems with ICs was from the very beginning one of the major attractions of the silicon micromachining technology. Practical implementation of this integration ...

Motion processing, which measures and intelligently processes the movements of devices in three dimensional spaces, is the next major disruptive technology that will drive innovation in handheld ...